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    橢偏儀——SE500

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    簡介


    SE500
    橢偏儀是一種利用光的偏振態變化來進行薄膜性質表征的儀器,主要用來測量薄膜材料的厚度、NK參數等性質。橢偏儀的主要原理是將自然光(紫外光、可見光以及紅外光)變成完全偏振光后通過一定角度入射到樣品上,偏振光進入樣品介質后會反射回到橢偏儀檢偏器內,由于樣品介質會對偏振光的偏振態發生改變,而這種改變會被橢偏儀測量,橢偏儀就是利用這個介質對偏振光性質改變的原理來表征介質的性質的
    SE500型號采用雙光譜儀耦合實現250-1700nm超長波段的探測,可實現對材料紫外、可見和紅外波段的全覆蓋測量研究,同時可搭配自動平臺掃描、自動變角、微光斑探測以及平臺加熱等功能滿足不同應用需求。

    系統配置:

     探測器:陣列探測器,

    光源:高功率的DUV-Vis-NIR復合光源

    軟件:TFProbe 3.3版本的軟件

    入射角度變化:手動調節

     測量種類:薄膜厚度、折射率和消光系數以及多層膜堆疊

    計算機:Intel雙核處理器、19”寬屏LCD顯示器

    電源:110–240V AC/50-60Hz,6A

    保修:一年的整機及零部件保修

     

    規格參數


    波長范圍:250nm到1700 nm

    光斑尺寸:1mm至5mm可變

    樣品尺寸:直徑可達200mm

    測量厚度范圍*:?30μm

    測量時間:約1秒/位置點

    入射角范圍:20到90度,5度間隔

     重復性誤差*:小于1 ?

     

    可選項配置:

    用于反射的光度測量或透射測量;

    用于測量小區域的微小光斑;

    用于改變入射角度的自動量角器;

    X-Y成像平臺(X-Y模式,取代ρ-θ模式);

    加熱/致冷平臺;

    樣品垂直安裝角度計;

    波長可擴展到遠DUV或IR范圍;

    掃描單色儀的配置;

    聯合MSP的數字成像功能,可用于對樣品的圖像進行測量等。

     

    其他選項配置:

    用于玻璃基底測量的特殊樣品架

    用于觀察樣品區的可視模塊

    加熱或制冷平臺

    可用于實時在線測量

    其他尺寸的樣品臺

    用于 Liquid Cell 的特殊配置

    用于單波長或窄波段探測的單色掃描儀配置

     

    相關產品


    光譜反射分析系列:SR100、SR300、SR500等

    微光斑分析系列:MSP100、MSP300、MSP500等

    橢偏儀系列:SE200BA、SE200BM等

    自動掃描測試平臺:M100、M150、M200等

    未找到相應參數組,請于后臺屬性模板中添加

    SE500簡介
    橢偏儀是一種利用光的偏振態變化來進行薄膜性質表征的儀器,主要用來測量薄膜材料的厚度、NK參數等性質。橢偏儀的主要原理是將自然光(紫外光、可見光以及紅外光)變成完全偏振光后通過一定角度入射到樣品上,偏振光進入樣品介質后會反射回到橢偏儀檢偏器內,由于樣品介質會對偏振光的偏振態發生改變,而這種改變會被橢偏儀測量,橢偏儀就是利用這個介質對偏振光性質改變的原理來表征介質的性質的。
    SE500型號采用雙光譜儀耦合實現250-1700nm超長波段的探測,可實現對材料紫外、可見和紅外波段的全覆蓋測量研究,同時可搭配自動平臺掃描、自動變角、微光斑探測以及平臺加熱等功能滿足不同應用需求。

    波長范圍:250nm到1700 nm

    光斑尺寸:1mm至5mm可變

    樣品尺寸:直徑可達200mm

    測量厚度范圍*:?30μm

    測量時間:約1秒/位置點

    入射角范圍:20到90度,5度間隔

     重復性誤差*:小于1 ?

     

    可選項配置:

    用于反射的光度測量或透射測量;

    用于測量小區域的微小光斑;

    用于改變入射角度的自動量角器;

    X-Y成像平臺(X-Y模式,取代ρ-θ模式);

    加熱/致冷平臺;

    樣品垂直安裝角度計;

    波長可擴展到遠DUV或IR范圍;

    掃描單色儀的配置;

    聯合MSP的數字成像功能,可用于對樣品的圖像進行測量等。

     

    其他選項配置:

    用于玻璃基底測量的特殊樣品架

    用于觀察樣品區的可視模塊

    加熱或制冷平臺

    可用于實時在線測量

    其他尺寸的樣品臺

    用于 Liquid Cell 的特殊配置

    用于單波長或窄波段探測的單色掃描儀配置

    光譜反射分析系列:SR100、SR300、SR500等

    微光斑分析系列:MSP100、MSP300、MSP500等

    橢偏儀系列:SE200BA、SE200BM等

    自動掃描測試平臺:M100、M150、M200等

    暫未實現,敬請期待
    暫未實現,敬請期待

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